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Finnország – Laboratóriumi, optikai és precíziós felszerelések (kivéve szemüvegek) – Ion beam trimmer

VTT Technical Research Centre of Finland Ltdil-FinlandjaNpubblikat fi 27 Apr 2026
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Deskrizzjoni

The object of the tender is 200 mm wafer particle beam trimming tool for VTT Micronova cleanroom semiconductor front end processing. The particle beam may be an ion beam, or a gas cluster beam, with a full width at half maximum within 3-15 mm. The tool must be compatible with installation in an ISO 4 classified cleanroom. The object of the tender process is described in more detail in the invitation to tender documents.

Kodi CPV

Laboratory, optical and precision equipments (excl. glasses)

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Contains data from Tenders Electronic Daily (TED), © European Union, ted.europa.eu — CC BY 4.0.

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