France – Electronic, electromechanical and electrotechnical supplies – Équipement de 300 mm pour du dépôt métallique par de PVD

For its research activities aimed at developing 10 nm FD-SOI technologies and beyond, CEA-LETI wishes to acquire a 300 mm equipment for metal deposition by PVD. The equipment will be multi-chamber and must include at least 5 deposition chambers, a vacuum transfer platform, a dedicated oxidation chamber, a pre-cleaning chamber and a degassing module. The load port must accommodate at least 3 FOUPs. The envisaged contract includes the following options: - Mandatory option: OPT1: 1 additional year of extended warranty (Section 11.1 of the tender specifications) - Optional options: OPT2: Heat exchangers/coolers (Section 3.2.6 of the tender specifications) OPT3: Electrical power transformer (Section 4.1.4 of the tender specifications) OPT4: First-level maintenance training (Section 9 of the tender specifications) OPT5: Advanced-level maintenance training (Section 9 of the tender specifications)