Netherlands – Laboratory, optical and precision equipments (excl. glasses) – European Tender Electron Beam Lithography system
Description
The University of Twente is tendering to purchase an Electron Beam Lithography system. The MESA+ Institute of the University of Twente will invest in a new Electron Beam system (e-beam system). A system, suitable for defining patterns in electron sensitive resists, at high resolution and high speed, compatible with a wide range of applications and substrate types up to 200mm in diameter. The system will be used by a wide range of users, i.e. academic researchers and students as well as industrial engineers with different backgrounds (photonics, (nano)-electronics etc.) and different levels of expertise.
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Documents & submission
Contains data from Tenders Electronic Daily (TED), © European Union, ted.europa.eu — CC BY 4.0.
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