France – Microelectronic machinery and apparatus – Acquisition et mise en service d’un équipement ALD pour les films avancés métalliques et nitrures métalliques pour le CEA de GRENOBLE - ALD Tool for advanced metal and metal nitrides

Within the framework of its research activities aimed at developing 10 nm and beyond fully depleted silicon-on-insulator (SOI) technologies, CEA-LETI wishes to acquire a fully automatic atomic layer deposition (ALD) equipment. This equipment will primarily process 300 mm wafers (or 200 mm wafers using 200-300 mm carriers). It is intended for the deposition of metals as well as metal nitrides for non-volatile memories and advanced contacts. This equipment must also include a cleaning solution to improve surface quality before the deposition of metals and metal nitrides. The contract also includes the following mandatory option for pricing*: - Option 1 – Level 1 Maintenance Training (Chapter 9) The contract also includes the following optional pricing options*: - Option 2 – Heat exchangers and chiller systems (Section 3.2.6) - Option 3 – Power supply transformer (Section 4.1.4) - Option 4 – Advanced Maintenance Training (Chapter 9) - Option 5 – Preventive, corrective maintenance services and necessary spare parts (Section 12.2) - Option 6 – One additional year of warranty extension - The price of transport, insurance included, according to the conditions DAP CEA Grenoble (Incoterms ICC 2020)