Germany – Measuring instruments – Positionierungssystem für experimentelle Mikromagnetisierungsprozesse

With micrometer-precise positioning of magnetic write heads, permanent magnetic thin film layers are to be selectively magnetized. The purpose of the positioning system is to test a magnetization concept. The micrometer-precise relative positioning of a magnetic write head on the substrates to be magnetized is to be carried out in an overall system via an XYR stage (lateral translation and rotation of the substrate) and Z-axis (vertical translation) (see Systemübersicht.pdf). The latter is mounted above the substrate on a specified traverse, which can accommodate the magnetization heads. It is used for vertical approach in the sub-micrometer range and for defined contact establishment of the write head with the substrate in order to carry out magnetizations. Both subsystems – XYR stage and Z-axis – must be coordinated with each other in such a way that they can achieve the specified positioning precision in the overall system and enable trajectory movements. In addition to an equipped Z-axis, the specified traverse is to be designed and supplied with mounts for two further, identical write heads for a potential retrofit. The constructed, mechanical mounts must be designed in such a way that each write head can reach any position on a 150 mm wafer. All framework conditions and requirements of the subsystems are specified below and partially to be taken from attached documents.