Switzerland – Laboratory, optical and precision equipments (excl. glasses) – Un système de pulvérisation cathodique dédié à la déposition de couches minces supraconductrices de haute qualité

The EPFL, in close collaboration with the University of Geneva (UNIGE), plans to acquire a state-of-the-art sputter deposition system specifically designed for the production of high-quality superconducting thin films. The system will be installed and operated at the EPFL Center of MicroNanotechnology (EPFL CMi). The CMi is a centralized facility for micro- and nano-fabrication serving all faculties of the EPFL and open to external universities as well as local industrial partners (over 600 active users per year). The new system will be used for cutting-edge research in the field of single-photon detectors, with the aim of bridging the gap between laboratory manufacturing and industrial production by enabling deposition on wafers with a diameter of 200 mm. Special attention will be paid not only to the quality of the depositions and the superconducting properties of the thin films, but also to the user-friendliness of the systems, their ease and speed of training for new users, as well as their flexible yet robust ability to control processes in an R&D environment. Great importance will also be placed on the proximity and responsiveness of the supplier regarding the entire technical support and process support. In line with the requirements of the EPFL as well as the scientific goals of the CMi and the UNIGE, particular attention will be paid to the following points: ● Quality, reproducibility and uniformity of the superconducting thin films. ● Integration with our infrastructures.