France – Electronic, electromechanical and electrotechnical supplies – Fourniture d’un équipement de métrologie optique 100/150/200mm

In the context of its research and development partnership activities, CEA LETI wishes to acquire an optical inspection system dedicated to unstructured wafers, capable of inspecting 100 mm, 150 mm and 200 mm wafers (referred to as a "bridge tool"), to replace the old systems used until now. The selected tool must be capable of inspecting thin and thick substrates. This system will be used for the qualification of processes in a clean room at different stages of the process (as long as the substrates are not structured); it must be able to handle exotic substrates and be capable of inspecting and, at the user's request, collecting images of defects (microscope image acquisition). The envisaged contract includes: - A basic equipment; - The following mandatory option for pricing: o OPT1: Extension of an additional year of warranty - As well as the following optional pricing options: o OPT2: Heat exchangers / coolers o OPT3: Transformer o OPT4: First-level maintenance training o OPT5: Advanced maintenance training o The price of transport, insurance included, according to the conditions DAP CEA Grenoble (Incoterms ICC 2020 Convention)