Germany – Miscellaneous general and special-purpose machinery – Inline automatic optical inspection (AOI) with high-speed Analysis for QMI systems

Modular, fully automated prober for optical inspection and electrical contact of electronic, photonic and micro-mechanical devices — including advanced manufacturing approaches such as quasi-monolithic integration. The system handles 200 mm wafers as well as frames, tapes, trays and comparable substrates. An end-to-end carrier handling system loads carriers with mounted substrates from specialized cassettes, positions them on the prober's vacuum chuck and performs fully automated alignment. A testcard/probe-card interface is provided for electrical connection. Probe detection and fine positioning are performed automatically to ensure reproducible contact conditions. The control software supports programmable sequence control and reference-point based alignment. For optical inspection the system offers a movable mechanical interface to accept modular, customer-supplied optical inspection modules (e.g., microscope with camera) with lateral and vertical adjustment. The space above the