France – Microelectronic machinery and apparatus – Fourniture d’un système d’inspection optique compatible en 100, 150 et 200mm

For its research activities and the development of its partnerships, CEA LETI wishes to acquire an optical inspection system dedicated to unstructured wafers, capable of inspecting diameters of 100 mm, 150 mm and 200 mm with advanced sensitivity. The selected system must be able to inspect substrates of different materials and thicknesses. The contract includes an option with mandatory pricing: - Option No. 1: One additional year of warranty, bringing the total warranty to two years. The contract includes options with optional pricing: - Option No. 2: supply of an electrical transformer (Article 4.1.4 of the tender specifications) - Option No. 3: training for first-level maintenance of the inspection system, - Option No. 4: training for advanced maintenance of the inspection system.