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Germany – Miscellaneous special-purpose machinery – IMS Chips - Vergabe einer Belackungs- und Entwicklungsanlage für Wafer
Institut für Mikroelektronik Stuttgart Stiftung des bürgerlichen RechtsGermanyPublished on May 28, 2026
No deadline given
GermanyDescription
The subject of the present procurement procedure is the coating/development system for the processing of 150mm and 200mm wafers with alternating photoresists for iLine- and E-Beam lithography. Optionally, a full maintenance contract with uptime guarantee is to be offered. The maximum delivery time is 18 months after award.
CPV codes
Miscellaneous special-purpose machinery
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Sign in for an AI summaryContains data from Tenders Electronic Daily (TED), © European Union, ted.europa.eu — CC BY 4.0.
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