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Germany – Miscellaneous special-purpose machinery – FBH-01.2 ALE-Trockenätzanlage einschließlich Nebenleistungen (Installation, Wartung, Support)
Ferdinand-Braun-Institut gGmbH, Leibniz-Institut für HöchstfrequenztechnikGermanyPublished on Sep 13, 2026
No deadline givenDescription
For the implementation of current research and development work, an ALE dry etching system for processing III-V semiconductors is required. The system shall enable high-precision etching processes in the nanometer range.
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Miscellaneous special-purpose machinery
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Sign in for an AI summaryContains data from Tenders Electronic Daily (TED), © European Union, ted.europa.eu — CC BY 4.0.
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