Belgium – Laboratory, optical and precision equipments (excl. glasses) – 2 PVD systemen en materiaal

Lot 1 Explanation

The contracting authority intends to purchase a high-quality thin-film deposition system for advanced materials research within the framework of the ERC-funded project THERMAGINE. The system will be used for the deposition and engineering of magnetic metallic and oxide thin films and multilayer stacks with nanometer-scale thickness control. The equipment will primarily be used for the fabrication of magnetic (multilayer) thin films and wedges for nanomagnetic research. The system must therefore provide a high degree of flexibility, reproducibility, process stability and automation. For technical details see part III.

Lot 2 Explanation

To facilitate exploratory research in the UGent cleanroom, a new physical vapor deposition (PVD) system is required which can handle substrates of at least 100 mm size. The PVD system will be shared between the photonics research group (PRG) and liquid crystals and photonics (LCP) research groups to deposit a wide range of (mostly) metal or dielectric thin films. Included in the assignment is the start-up and installation of the tool, as well as a load-lock for faster loading of the samples and training by the equipment provider. A 100 mm PVD thin film deposition system, with both e-gun evaporation and sputtering sources and a load-lock.

Lot 3 Explanation

First-year consumables for Lot 2. Lot 3 concerns the one-off purchase of the consumables specifically required for the PVD system described under Lot 2 and for use in the UGent cleanroom during the first year of operation. The inventory must include at least gold for sputtering targets, titanium for sputtering targets, gold for e-gun evaporation and titanium for e-gun evaporation. Other consumables used in lower quantities, such as aluminium, nickel, platinum, aluminium oxide, chromium and similar materials, may be offered as optional additional items but are not mandatory.