Germany – Miscellaneous special-purpose machinery – Upgrade of a 200 mm WxZ Tungsten CVD Chamber to WxZ Sprint Configuration

The subject of the procurement is the upgrade of an existing 200 mm Wolfram Chemical Vapor Deposition (CVD) system, manufactured by Applied Materials Inc. (AMAT), to a WxZ Sprint configuration. This includes, in particular, modifications to the gas distribution system to achieve a pulsed tungsten deposition process, as well as the integration of additional hardware to enable deposition pressures up to 300 Torr. The services include the planning, delivery, integration, commissioning, and qualification of the necessary hardware and software modifications to the existing plant system.